Molecular Beam Epitaxy & Electron Spectroscopy
Molecular Beam Epitaxy
Characteristics
(Mod.32; Riber)Stainless steel UHV system (Standard pressure 6 10-11 mbar). Turbo molecular pump for roughing: 240 l/sec – Ionic pump: 500 l/sec – Titanium sublimator. X-Y-Z manipulator with resistive heating.
Tmax=800 °C. Knudsen cells: Ga, As, In, Al, Si (as dopant). Rheed optics E= 10 KeV.
High Resolution Electron Energy Loss Spectroscopy
HREELS cross section
Characteristics
Stainless steel UHV system (Standard pressure 4×10-11mbar). Turbo molecular pump for roughing: 240 l/sec – Ionic pump: 200 l/sec – Titanium sublimator. X-Y-Z manipulator with resistive heating. T max=800 °C. Leed optics.